Annotation of the articleThis paper presents a new method for electrically isolating released single crystal silicon (SCS) MEMS structures. The technology employs double-side processing DRIE to obtain functional high aspect ratio micro-mechanical structures and deep silicon oxidizing to isolate them from bulk silicon. Applicability of the technology to MEMS design was demonstrated with fabrication of the comb drive microactuator.Keywords: comb drive, DRIE, micromechanics, thermal grown oxide |